NANOLAMINATES

作品数：13被引量：21H指数：3
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相关期刊：《Science China Materials》《Journal of Materials Science & Technology》《Chinese Physics B》《Nano Research》更多>>
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Surface termination effects on the electrical characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition
《Chinese Physics B》2020年第11期503-507,共5页Ji-Bin Fan Shan-Ya Ling Hong-Xia Liu Li Duan Yan Zhang Ting-Ting Guo Xing Wei Qing He 
Project supported by the National Natural Science Foundation of China(Grant Nos.61604016 and 51802025);China Postdoctoral Science Foundation(Grant No.2017M613028);the Fundamental Research Funds for the Central Universities,China(Grant Nos.300102319209 and 300102310501);the Innovation,and Entrepreneurship Training Program for Undergraduates(Grant Nos.202010710231 and 201910710564).
Effects of initial surface termination on electrical characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition are studied by conductive atomic force microscopy working in contact mode and stan...
关键词：La2O3/Al2O3 atomic layer deposition TERMINATION ANNEALING 
Influences of different oxidants on characteristics of La_2O_3/Al_2O_3 nanolaminates deposited by atomic layer deposition被引量：1
《Chinese Physics B》2017年第6期395-400,共6页樊继斌 刘红侠 段理 张研 于晓晨 
supported by the National Natural Science Foundation of China(Grant Nos.61604016 and 51501017);the Fundamental Research Funds for the Central Universities,China(Grant No.310831161003)
A comparative study of two kinds of oxidants（H2O and O3） with the combination of two metal precursors（TMA and La（～iPrCp）3） for atomic layer deposition（ALD） La2O3/Al2O3 nanolaminates is carried out. The effect...
关键词：La2O3/Al2O3 nanolaminates atomic layer deposition OXIDANTS ANNEALING 
Performance and reliability improvement of La_2O_3/Al_2O_3 nanolaminates using ultraviolet ozone post treatment
《Chinese Physics B》2017年第5期376-381,共6页樊继斌 刘红侠 孙斌 段理 于晓晨 
Project supported by the National Natural Science Foundation of China(Grant Nos.61604016 and 51501017);the Fundamental Research Funds for the Central Universities,China(Grant No.310831161003)
La-based binary or ternary compounds have recently attracted a great deal of attention as a potential candidate to replace the currently used Hf-based dielectrics in future transistor and capacitor devices for sub-22 ...
关键词：ultraviolet annealing ozone photoelectron moisture conductive suppressed replace dielectric annealed 
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