Project supported by the Key Research and Development Program of Shaanxi Province,China(Grant No.2020ZDLGY03-07);the National Science Foundation of China(Grant Nos.61774117 and 61774119);the Science Challenge Project(Grant No.TZ2018003);the National Key R&D Program of China(Grant No.2017YFB0102302);the Shaanxi Science&Technology Nova Program,China(Grant No.2019KJXX-029);the Key-Area Research and Development Program of Guang Dong Province,China(Grant No.2020B010170001);the Fundamental Research Funds for the Central Universities,China(Grant No.5012-20106205935)。
This paper presents the development of lateral depletion-mode n-channel 4 H-SiC junction field-effect transistors(LJFETs)using double-mesa process toward high-temperature integrated circuit(IC)applications.At room tem...