supported by the National Key Research and Development Program(No.2016YFB0400500);the Key Research and Development Projects in Guangdong Province(No.2019B010144001)。
Superjunction technology is believed to reach the optimal specific on-resistance and breakdown voltage trade-off.It has become a mainstream technology in silicon high-voltage metal oxide semiconductor field effect tra...
An analytical model of the electric field distributions of buried superjunction structures,based on the charge superposition method and Green's function approach,is derived.An accurate approximation of the exact anal...