云南高校图书馆联盟文献共享服务平台- MODULATION-DOPING

MODULATION-DOPING: 作品数：1被引量：0H指数：0; 导出分析报告; 相关领域：电子电信更多>>; 相关期刊：《Journal of Semiconductors》更多>>; 相关基金：国家自然科学基金国家高技术研究发展计划更多>>

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The effect of δ-doping and modulation-doping on Si-doped high Al content n-Al_xGa_(1-x)N grown by MOCVD: 《Journal of Semiconductors》2013年第5期26-28,共3页朱邵歆闫建昌曾建平张宁司朝董鹏李晋闽王军喜; supported by the National High Technology Research and Development Program of China(No.2011AA03 A 111);the National Natural Science Foundation of China(No.61006038); The effect of periodic delta-doping and modulation-doping on high Al content n-AlxGa1-xN （x = 0.55） epilayers grown by MOCVD has been investigated. Measured by XRD, AFM, contactless sheet resistance, and Hall-effect...; 关键词：n-Alx Ga1-xN MOCVD Δ-DOPING MODULATION-DOPING dopants diffusion