云南高校图书馆联盟文献共享服务平台- MICROACTUATOR

MICROACTUATOR: 作品数：12被引量：18H指数：3; 导出分析报告; 相关领域：电子电信自动化与计算机技术更多>>; 相关期刊：《Journal of Electromagnetic Analysis and Applications》《Transactions of Tianjin University》《Microsystems & Nanoengineering》《Optoelectronics Letters》更多>>; 相关基金：国家自然科学基金国家高技术研究发展计划更多>>

TiNiHf/SiO_(2)/Si shape memory film composites for bidirectional micro actuation被引量：1: 《International Journal of Smart and Nano Materials》2022年第2期293-314,共22页Sabrina M.Curtis Marian Sielenkamper Gowtham Arivanandhan Duygu Dengiz Zixiong Li Justin Jetter Lisa Hanke Lars Bumke Eckhard Quandt Stephan Wulfinghoff Manfred Kohl; The martensitic phase transformation in Ti_(40.4)Ni_(48)Hf_(11.6) shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO_(2)/Si com-posites.The shape memory properties of magnetron sputtered Ti_...; 关键词：Bimorph microactuator NiTiHf bistable actuator shape memory alloy thin films

Re-engineering artificial muscle with microhydraulics被引量：1: 《Microsystems & Nanoengineering》2017年第1期278-285,共8页Jakub Kedzierski Eric Holihan Rafmag Cabrera Isaac Weaver; This material is based upon work supported by the Assistant Secretary of Defense for Research and Engineering under Air Force Contract No.FA8721-05-C-0002 and/or FA8702-15-D-0001.; We introduce a new type of actuator,the microhydraulic stepping actuator(MSA),which borrows design and operational concepts from biological muscle and stepper motors.MSAs offer a unique combination of power,efficiency...; 关键词：artificial muscle ELECTROWETTING linear actuator MICROACTUATOR MICROSYSTEM microhydraulic stepping actuator

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators被引量：4: 《Microsystems & Nanoengineering》2016年第1期101-105,共5页Benjamin Gorissen Chris Van Hoof Dominiek Reynaerts Michael De Volder; BG is a Doctoral Fellow of the Research Foundation—Flanders(F.W.O.),Belgium.MDV acknowledges support from the ERC starting grant HIENA(no.337739).; Over the past few decades,polydimethylsiloxane(PDMS)has become the material of choice for a variety of microsystem applications,including microfluidics,imprint lithography,and soft microrobotics.For most of these appl...; 关键词：PDMS lithography SU8 etch mask MICROACTUATOR bending actuator fluidic actuator

Development of Wearable Micro-actuator Array for 3-D Virtual Tactile Displays: 《Journal of Electromagnetic Analysis and Applications》2012年第6期219-229,共11页Zoltan Szabo Eniko T. Enikov; A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators g...; 关键词：MICRO-ACTUATOR voice-coil MICROACTUATOR TACTILE display

Experimental study of the characteristics of novel microactuator based on optothermal expansion被引量：1: 《High Technology Letters》2009年第2期131-134,共4页刘超; Supported by the National High Technology Research and Development Program of China (No. 2006AA04Z237);the National Natural Science Foundation of China (No. 50775205); A novel asymmetric optothermal microactuator was developed. A microactuator of 750μm length was machined by an excimer laser micmmachining system using single layer material. It had an asymmetric structure consisting...; 关键词：optothermal expansion MICROACTUATOR asymmetric structure DEFLECTION VIBRATION

Modeling and optimal design of multilayer thermal cantilever microactuators被引量：5: 《Science China(Technological Sciences)》2009年第5期1167-1170,共4页FU JianYu CHEN DaPeng YE TianChun JIAO BinBin OU Yi; Supported by the National Natural Science Foundation of China (Grant No. 60576053);Hi-Tech Research and Development Program of China (Grant No. 2007AA03Z333); A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived.The sim-plified expression received from the model avoids inverting complex matrices enhances understanding and makes it ea...; 关键词：THERMAL MICROACTUATOR TIP DEFLECTION MULTILAYER model optimization

A dynamic macromodel for distributed parameter magnetic microactuators: 《Chinese Physics B》2008年第5期1709-1715,共7页方玉明黄庆安李伟华; supported in part by the National High Technology Research and Development Program of China (Grant No2006AA04z302); This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and...; 关键词：magnetic microactuator macromodel microelectromechanical systems （MEMS）

Experimental study of novel microactuator based on photothermal expansion: 《Optoelectronics Letters》2008年第2期89-91,共3页LIU Chao ZHANG Dong-xian ZHANG Hai-jun; the National High Technology Research and Development Program of China (Grant No.2006AA04Z237); A novel photothermal drive method was proposed. A novel photothermal micro-actuator （PTA） was developed with this method. We introduced the deflection mechanism of the asymmetric expansive arms with different widths...; 关键词：光致发热 PTA 激光器集成光学

Design and optimization of cantilevered magnetostrictive film-substrate microactuator被引量：1: 《Science China(Technological Sciences)》2007年第5期683-693,共11页B.Narsu; Supported by the National Natural Science Foundation of China (Grant No. 10147203);the Program for New Century Excellent Talents in Uni-versity (Grant No. NCET-2005-0272);the Key Project of the Ministry of Education of China (Grant No. 206024); The exact solution for the bending problem of a free-end point loaded film- substrate cantilever with arbitrary film-to-substrate thickness ratio is obtained by using the basic mechanical equilibrium equation. And the...; 关键词：magnetic film-substrate system cantilever deflection actuator exerted FORCE

Design and fabrication of a bistable electromagnetic microactuator被引量：1: 《Journal of Shanghai University(English Edition)》2006年第6期541-546,共6页张永华丁桂甫孙晓峰蔡炳初; Projece supported by National Natural Science Foundatin ofChina(Grant No .10377009);National High-Technology Researchand Development Program(Grant No .863 -2003AA404140) ;Science Foundation of National Information Industry Ministry ofChina(Grant No .41308050116); An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The can...; 关键词：micro- electromechanical system（ MEMS） MICROACTUATOR bistable electromagnetic actuation UV-LIGA technology.

MICROACTUATOR