MWPCVD

作品数:20被引量:40H指数:3
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相关领域:理学一般工业技术更多>>
相关作者:邬钦崇舒兴胜杨国伟俞世吉马腾才更多>>
相关机构:中国科学院等离子体物理研究所湘潭大学大连理工大学合肥工业大学更多>>
相关期刊:《高技术通讯》《电子科技大学学报》《无机化学学报》《物理学报》更多>>
相关基金:国家高技术研究发展计划湖南省自然科学基金国家教委资助优秀年轻教师基金国家重点基础研究发展计划更多>>
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  • 期刊=Plasma Science and Technologyx
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Integrated Carbon Nanotubes Electrodes in Microfluidic Chip via MWPCVD
《Plasma Science and Technology》2010年第5期556-560,共5页王升高 王明洋 余冬冬 张文波 邓晓清 杜宇 程莉莉 汪建华 
Supported by National Natural Science Foundation of China (Nos.50572075, 51072140);the Young and Middle-Aged Elitists' Scientific and Technological Innovation Team Project of the Institutions of Higher Education in Hubei Province of China; the Scientific Research Projects of Hubei Education Department of China (Z200715001)
An on-chip electrochemical detector for microfluidic chips was described, based on integrated carbon nanotube (CNT) electrodes directly onto the chip substrate through microwave plasma chemical vapor deposition (MW...
关键词:microfluidic chip integrated carbon naotube electrodes microwave plasmachemical deposition amperometrie detection 
Synthesis of Carbon Nanotubes by MWPCVD at Low Temperature
《Plasma Science and Technology》2002年第1期1135-1140,共6页王升高 汪建华 王传新 马志彬 满卫东 
Growth of carbon nanotubes (CNTs) at low temperature is very important to the ap- plications of nanotubes. In this paper, under the catalytic effect of cobalt nanoparticles supported by SiO2, CNTs were synthesized by ...
关键词:CNTS Synthesis of Carbon Nanotubes by MWPCVD at Low Temperature 
Study on Diamond Thin Films Deposition in a Quartz Bell-jar Type System for MWPCVD
《Plasma Science and Technology》2000年第1期161-165,共5页俞世吉 丁振峰 马滕才 邬钦崇 
the 863 Hi-Tech plan fund of China
Diamond thin films were prepared in a modified quartz bell-jar type microwave chemical vapor deposition (MWPCVD) system. The influences of process parameters on MWPCVD diamond thin films quality such as substrate pre...
关键词:Study on Diamond Thin Films Deposition in a Quartz Bell-jar Type System for MWPCVD 
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