The National Natural Science Foundation of China(No. 60974116 );the Research Fund of Aeronautics Science (No.20090869007);Specialized Research Fund for the Doctoral Program of Higher Education (No. 200902861063)
In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for...
The National High Technology Research and Development Program of China (863Program)(No.2002AA812038);the National Defense Pre-Research Support Program (No.41308050109)
A novel closed-loop control strategy of a silicon microgyroscope (SMG) is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reach...