Supported by the National Natural Science Foundation of China (Grant No. 60606004)
Silicon carbon nitride (SiCN) nanowires, nanorods and nanotubes have gained much attention due to their excellent field emission and photoluminescence properties. These nanostructures were usually grown using catalyst...
This work was supported by the National Natural Science Foundation of China (Grant No. 59972042); Korea National Research Laboratory Program (Grant No. M10400000061-04J0000-06110);the Doctor Innovation Fund of the National University of Defense Technogy in China(2001-2004).
Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as precer...