SU-8

作品数:107被引量:206H指数:7
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相关领域:电子电信更多>>
相关作者:张斌珍张大明陈长鸣丁桂甫赵建龙更多>>
相关机构:上海交通大学中国科学院大连理工大学吉林大学更多>>
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相关基金:国家自然科学基金国家重点基础研究发展计划国家高技术研究发展计划吉林省科技发展计划基金更多>>
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Fabrication of optical fiber sensor based on double-layer SU-8 diaphragm and the partial discharge detection被引量:3
《Optoelectronics Letters》2015年第1期61-64,共4页商娅娜 倪晴燕 丁丁 陈娜 王廷云 
supported by the National Basic Research Program of China(No.2012CB723405);the Science and Technology Commission of Shanghai Municipality(Nos.13510500300,14DZ1201403 and 14511105602)
In this paper, a partial discharge detection system is proposed using an optical fiber Fabry-Perot(FP) interferometric sensor, which is fabricated by photolithography. SU-8 photoresist is employed due to its low Young...
关键词:envelope chromatic modulator wideband photonic receiver filtering impulse optics narrow 
Fabrication of high aspect ratio gratings for X-ray imaging
《Optoelectronics Letters》2014年第2期88-90,共3页侯双月 熊瑛 陈珊 熊鹏辉 陈翔宇 张晓波 田扬超 刘刚 
supported by the Major State Basic Research Development Program of China(No.2012CB825804)
Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabric...
关键词:X射线成像系统 纵横比 光栅 制造 曝光剂量 内部结构 SU-8 照射剂量 
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