EACVD

作品数:28被引量:35H指数:3
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相关领域:理学电子电信更多>>
相关作者:董丽芳赵庆勋卢文壮左敦稳詹如娟更多>>
相关机构:河北大学南京航空航天大学中国科学技术大学吉林大学更多>>
相关期刊:《真空》《计算物理》《量子电子学报》《机械设计与制造》更多>>
相关基金:国家自然科学基金河北省自然科学基金江苏省自然科学基金更多>>
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  • 期刊=Journal of Rare Earthsx
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Si/Nanocrystalline Diamond Film Heterojunction Diodes Preparation
《Journal of Rare Earths》2006年第z1期45-48,共4页Wu Nanchun Xia Yiben Tan Shouhong Wang Linjun Cui Jiangtao 
Project supported by the National Natural Science Foundation of China (60277024)
With electron assisted hot filament chemical vapor deposition technology, nanocrystalline diamond films were deposited on polished n-(100)Si wafer surface. The deposited films were characterized and observed by Raman ...
关键词:NANOCRYSTALLINE DIAMOND film p-n HETEROJUNCTION DIODE RECTIFICATION characterization EACVD 
Nanocrystalline Diamond Films Deposited by Electron Assisted Hot Filament Chemical Vapor Deposition
《Journal of Rare Earths》2006年第z1期107-110,共4页Wu Nanchun Xia Yiben Tan Shouhong Wang Linjun 
Project supported by the National Natural Science Foundation of China (60277024)
Nanocrystalline diamond films were deposited on polished Si wafer surface with electron assisted hot filament chemical vapor deposition at 1 kPa gas pressure, the deposited films were characterized and observed by Ram...
关键词:NANOCRYSTALLINE DIAMOND film surface ROUGHNESS RESISTIVITY EACVD 
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