FBAR

作品数：104被引量：120H指数：5
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相关领域：电子电信更多>>
相关作者：高杨董树荣李君儒何婉婧黄继伟更多>>
相关机构：浙江大学中国工程物理研究院电子工程研究所西南科技大学中国电子科技集团第二十六研究所更多>>
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相关基金：国家自然科学基金国家高技术研究发展计划宁波市自然科学基金教育部重点实验室开放基金更多>>
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Portable FBAR based E-nose for cold chain real-time bananas shelf time detection被引量：1
《Nanotechnology and Precision Engineering》2023年第1期32-39,共8页Chen Wu Jiuyan Li 
supported financially by the National Natural Science Foundation of China (Grant Nos.22078051 and U1801258);the Fundamental Research Funds for the Central Universities (Grant No.DUT22LAB610).
Being cheap,nondestructive,and easy to use,gas sensors play important roles in the food industry.However,most gas sensors are suitable more for laboratory-quality fast testing rather than for cold-chain continuous and...
关键词：Film bulk acoustic resonator(FBAR) Portable E-nose Real-time detection Layer by layer 
A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents被引量：1
《Nanotechnology and Precision Engineering》2022年第1期43-48,共6页Xu Yan Hemi Qu Ye Chang Wei Pang Xuexin Duan 
The authors gratefully acknowledge financial support from the National Natural Science Foundation of China(NSFC Nos.62174119 and 21861132001);the National Key R&D Program of China(2018YFE0118700);Tianjin Applied Basic Research and Advanced Technology(17JCJQJC43600);the 111 Project(B07014);the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.
The presence of chemical warfare agents(CWAs)in the environment is a serious threat to human safety,but there are many problems with the currently available detection methods for CWAs.For example,gas chromatography–m...
关键词：Micro-preconcentrator Film bulk acoustic resonator Chemical warfare agent Microelectromechanical system 
FlexMEMS-enabled hetero-integration for monolithic FBAR-above-IC oscillators被引量：1
《Nanotechnology and Precision Engineering》2019年第3期105-109,共5页Chuanhai Gao Menglun Zhang Yuan Jiang 
supported by National High Technology Research and Development Program of China(863 Program)under Grant No.2015AA042603;the 111 Project under Grant No.B07014;Nanchang Institute for Microtechnology of Tianjin University
In this work,a monolithic oscillator chip is heterogeneously integrated by a film bulk acoustic resonator(FBAR)and a complementary metal-oxide-semiconductor(CMOS)chip using FlexMEMS technology.In the 3 D-stacked integ...
关键词：FlexMEMS Hetero-integration Film bulk acoustic resonator SYSTEM-ON-CHIP OSCILLATOR 
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