the National Natural Sci-ence Foundation of China (No.10435050,10675092,and 10675091);the"863"Project Plan (No.2006AA12Z139);the Program for New Century Excellent Talents in University (No.NCET-04-0376).
Intrinsic stresses of carbon films deposited by direct current (DC) magnetron sputtering were investigated. The bombardments of energetic particles during the growth of films were considered to be the main reason fo...