基于硅微加工技术的新型变形反射镜  

Novel deformable mirror based on silicon micromachining technology

作　　者：余洪斌[1] 陈海清[1] 张大成[2] 竺子民[1] 李婷[2] 

机构地区：[1]华中科技大学光电子工程系,湖北武汉430074 [2]北京大学微电子学研究所微米纳米加工技术国家重点实验室,北京100871

出　　处：《强激光与粒子束》2004年第7期825-829,共5页High Power Laser and Particle Beams

基　　金：总装"十.五"基础研究基金项目资助课题(41321030202)

摘　　要：　给出了一种基于硅微加工技术的新型变形反射镜的设计和加工方法。变形反射镜镜面主体是由一定厚度的硅膜构成,硅膜上表面溅射有一层Ti/Au,背面有一7×7阵列的台柱与之相连,台柱下方是对应的驱动电极。当给电极施加电压时,产生的静电力就会拉动台柱向下运动,从而使相应的镜面部分发生变形;通过控制通电电极的位置及电压,就可获得特定的镜面形状。在变形反射镜的加工工序中采用浅腐蚀形成键合台,采用深腐蚀加工出台柱。并采用<110>条补偿图形对台柱的凸角进行补偿,在0.2MPa气压下进行键合,最后成功研制出有效反射面积为30mm×30mm,拥有49个静电驱动单元的变形反射镜。Based on silicon micromachining technology, a novel deformable mirror with 30 mm × 30 mm effective reflecting surface and 49 actuators is designed and fabricated. It is composed of a silicon membrane, at the back of which is attached by a 7×7 pillars array. The pillars and bonding part are fabricated through two etching steps with different depth. In terms of optimization, a strip pattern is designed specially for the convex corner compensation during the etching process, and the anodic bonding process is performed under 0.2 MPa atmospheric pressures.

关 键 词：变形反射镜 体微加工 静电驱动 凸角补偿 阳极键合 

分 类 号：TN256[电子电信—物理电子学]