扩散硅多功能集成差压传感器  

Multi-parameter Integrated Differential Sensor of Piezoresistance

作　　者：唐慧[1] 孙海玮[1] 刘宏伟[1] 郑东明[1] 张治国[1] 陈信琦[1] 郑永辉 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043 [2]中国兰炼石油化工厂,甘肃兰州730060

出　　处：《仪表技术与传感器》2004年第7期6-7,共2页Instrument Technique and Sensor

摘　　要：传感器的智能化从数字运算上解决传感器的温度补偿、静压补偿问题,解决了以前静压无法补偿,仅靠工艺解决的难题;改变了温度补偿仅靠硬件电路的方式。大大提高了仪表的测量精度,达到0 1%和0 075%。增加了传感器输出的信息量,实现了传感器的智能化,这也是国际传感技术发展的方向。所研制的小型多功能压力传感器是利用微电子和微机械加工融合技术在尺寸仅为3 5mm×4 0mm的硅片上集差压敏感元件、静压敏感元件、温度敏感元件为一体、并将其封装在由金属膜片隔离密封的保护液中,具有可靠的密封性。利用数字补偿技术进行处理,可使其在-30～80℃的温度范围内,变送器精度达到0 1级。该传感器能够同时实现对现场中的差压、静压、温度变化的测量,静压和温度的测量数据可修正被测环境的差压输出信号,从而可提高差压传感器的精度,它是工业智能差压变送器的核心部件。The intellectualized sensors accomplish temperature and static pressure compensation by software to solve a puzzle which non-smart sensors can't compensate static error ago,which has to resolve by improving process technology of wafer in previous technology.The novel sensors have changed temperature compensation method relying only on hardware and largely improve measurement accuracy of instrument,which have reached 0.1% FS and 0.075% FS.The intellectualized sensors are a trend of international sensor technology development.The multi-parameter pressure sensors processed by MEMS technology with small size integrate differential pressure,static pressure and temperature sensitive element on a 3.5 mm×4.0 mm chip.The sensitive chip is packaged into protection liquid isolated by metallic diaphragm that has good seal feature.The transmitter accuracy has reach Grate 0.1 within -30～80 ℃ by means of digital compensation technology.The sensor can measure differential pressure,static pressure and temperature at same time.The static pressure and temperature data is used to correct differential signal in testing environment,so that sensor accuracy is highly improved.

关 键 词：扩散硅 多功能 集成差压传感器 差压敏感元件 静压敏感元件 温度敏感元件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]