石英玻璃上生长表面光滑高光透射率的金刚石膜  

Growth of Diamond Thin Films with Smooth Surface and High Transmittance on Quartz Glass Substrates

作　　者：郝天亮[1] 石成儒[1] 韩高荣[2] 

机构地区：[1]浙江大学中心实验室,杭州310028 [2]浙江大学材料系,杭州310028

出　　处：《真空科学与技术学报》2004年第4期283-288,共6页Chinese Journal of Vacuum Science and Technology

基　　金：浙江省自然科学基金资助项目 (No.5 970 83 )

摘　　要：石英玻璃衬底在金刚石粉和丙酮形成的悬浮液中超声波预处理 ,有效提高了金刚石成核密度。在最佳预处理和热丝化学气相沉积条件下 ,成核密度高达 10 10 cm-2 以上。采用HFCVD中四步法生长工艺 ,制备出了表面粗糙度小于 10nm、膜厚 30 0nm、晶粒直径 10 0nm～ 15 0nm、致密、均匀、高质量和高光透射率的金刚石膜 ,其 1μm～ 5 μm波段的光透射率达 74 %～85 %。金刚石膜与石英玻璃衬底结合牢固 ,膜中无裂纹。Quartz glass substrates were pretreated in the slurry of diamond powder and acetone,the nucleation on these substrates was greatly enhanced.Under optimal conditions of pretreatment and hot filament chemical vapor deposition(HFCVD),nucleation densities higher than 10 10 cm -2 were obtained.A four-step growth process in hot filament chemical vapor deposition was used,and compact,uniform diamond thin films with smooth surface (surface roughness<10 nm),300 nm depth,grain size 100 nm～150 nm high quality and high transmittance were successfully synthesized.The optical transmittance reached 74%～85% in the longer wave range 1 μm～5 μm.The adhesion of diamond thin films on quartz glass substrates was good and there was no crack existed in these films.

关 键 词：衬底 光透射 生长工艺 金刚石膜 波段 石英玻璃 膜厚 成核密度 表面光滑 热丝化学气相沉积 

分 类 号：TB383[一般工业技术—材料科学与工程] O484[理学—固体物理]