基于UV-LIGA技术制造微结构器件试验研究  

Experimental Research on Fabrication of Micro-structures & Micro-devices by UV-LIGA

作　　者：明平美[1] 朱荻[1] 胡洋洋[1] 曾永彬[1] 

机构地区：[1]南京航空航天大学

出　　处：《中国机械工程》2006年第21期2216-2220,共5页China Mechanical Engineering

基　　金：江苏省自然科学基金资助项目(BK2004214)

摘　　要：试验研究了UV-LIGA各工艺环节(包括前后烘、曝光、显影、去胶、电铸等)对金属基片上制造金属微结构器件质量的影响,并组合优化了操作条件和工艺参数。试验结果表明:采用优化后的UV-LIGA工艺条件,制造出的金属微结构器件(如微齿轮、微流道)轮廓清晰,表面质量好,无明显缺陷,与基底结合良好。This paper studied experimentally the influences of processing steps ot U V--LIGA,including before ＆ post exposure bake, exposure, development, resist removal, micro electroforming, on the quality of micro--structures ＆ micro--devices fabricated on metal--substrate, and optimized their operation conditions and processing parameters. Experimental results indicate that the metal micro- structures ＆ micro--devices such as microgear and micro flow channel fabricated by the optimized UV--LIGA processes has clear contour, good surface quality and excellent linkage with substrate,and it has not visible defects.

关 键 词：UV—LIGA 微结构器件 SU-8胶 光刻 微细电铸 

分 类 号：TM56[电气工程—电器]