X射线在超晶格材料衍射中的相干性分析  

Coherent Analysis of X-Ray Diffraction on Superlattice Material

作　　者：马永强[1] 武一宾[2] 杨瑞霞[3] 李若凡[2] 商耀辉[2] 牛晨亮[2] 卜夏正[2] 王建峰[2] 

机构地区：[1]河北工程大学,河北邯郸056038 [2]中国电子科技集团公司第十三研究所,石家庄050051 [3]河北工业大学,天津300130

出　　处：《半导体技术》2007年第12期1042-1044,1081,共4页Semiconductor Technology

基　　金：国防基础科研项目(D1120060468);装备预研基金项目(9140A12030506DZ23)

摘　　要：X射线双晶衍射仪系统中受参考晶体分辨率等因素的影响,X射线的相干长度不超过1μm。X射线在异质外延晶体材料内衍射时,不超过相干长度范围内厚度外延层中的衍射波会产生相干叠加,否则,产生非相干叠加。分子束外延(MBE)生长了短周期InGaAs/GaAs超晶格,在其摇摆曲线中观察到显示X射线在超晶格结构中衍射相干特征的多级卫星峰及Pendell song干涉条纹,并利用相干光理论对超晶格结构信息诸如周期及"0"级峰位置等进行了分析。Due to the effects of various factors including resolution of the reference crystal and so on in the double crystal X-ray diffractometer system, the coherent length of X-ray is no more than 1 μm. When X-ray diffracted on heteroepitaxial material, the diffraction waves would bring the coherent superimpose on the condition that the epilayer thickness is less than X-ray coherent length, otherw/se the incoherent superimpose would be occurred. Short period InGaAs/GaAs superlatices were grown by MBE. The orders of satellite peaks and Pendellosong interference stripes were observed in the rocking curves. Some information such as the period of the superlattice and the zero-order peak position on superlattice structure material were analyzed and calculated according to the theory of coherent light.

关 键 词：超晶格 分子束外延 X射线双晶衍射 相干长度 

分 类 号：TN304[电子电信—物理电子学]