压电陶瓷驱动并联微动机器人的研究  

Study of Parallel Micro Robot Driven by Piezoelectric Element

作　　者：孙立宁[1] 安辉[1] 蔡鹤皋[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,哈尔滨150001

出　　处：《高技术通讯》1997年第3期29-31,共3页Chinese High Technology Letters

基　　金：国家自然科学基金

摘　　要：介绍了集精密机械技术、精密测试技术和智能反馈技术于一体的压电陶瓷驱动六自由度并联微动机器人，该微动机器人采用以压电陶瓷为驱动元件和弹性支撑并联机器人的结构形式，具有高频响、高分辨率、结构紧凑、刚度大等优点，实现了机构、驱动、检测一体化，达到纳米级定位精度，是微驱动技术与并联机器人交叉结合的成功尝试。This paper presents a robot which combines precise machinery technique, precise testing technique and intelligent feedback technique. The robot has the virtues of high response, high resolution, compact structure and high seventy for adopting piezoelectric element and spring supporting parallel mechanism. The six degree-of-freedom parallel micro robot, which integrats the mechanism, driving and detection, is realized and reaches the nano level of positioning accuracy. It is a successful try of overlapping of micro driving technique and parallel robot.

关 键 词：压电陶瓷 并联机构 微驱动 机器人 

分 类 号：TP242.6[自动化与计算机技术—检测技术与自动化装置]