镀膜设备真空系统主泵的配置  

Configuration of main pump(s) in vacuum system for coating installation

作　　者：陈素君[1] 杨静[1] 

机构地区：[1]北京北仪创新真空技术有限责任公司,北京100022

出　　处：《真空》2010年第1期7-10,共4页Vacuum

摘　　要：真空系统是真空镀膜设备的主要组成部分,其主泵的选择对真空性能影响很大,真空镀膜设备的发展要求真空性能清洁无油,动态抽速大.传统的以油扩散泵为主泵的设备不能满足要求,本文叙述了油扩散泵、分子泵及低温泵的特点及北京北仪创新真空技术有限责任公司开发以分子泵及低温泵为真空系统主泵的镀膜设备情况.Main pump（s） is an integral part of the vacuum system in a vacuum coating installation, and its selection affects greatly the vacuum performance. The development of vacuum coating technology requires such a performance which shall provide clean and oil-free main pump（s） with high dynamic pumping speed, but the conventional main pump（s） which is usually an oil diffusion pump cannot meet the requirement. Describes the traits of oil diffusion pump, molecular pump and cryopump especially the vacuum coating installation developed by BEIYI, where the molecular pump and eryopump are taken as the main pumps in vacuum system.

关 键 词：真空镀膜设备 真空系统 主泵 油扩散泵 分子泵 低温泵 

分 类 号：TB752[一般工业技术—真空技术]