一种MEMS周期可调光栅衍射特性的实验研究  

Experimental Investigation of Diffraction Property for a MEMS-based Pitch-tunable Grating

作　　者：李太平[1] 李晓莹[1] 虞益挺[1] 燕斌[1] 孙瑞康[1] 乔大勇[1] 

机构地区：[1]西北工业大学机电学院微/纳米系统实验室,西安710072

出　　处：《光子学报》2010年第4期618-621,共4页Acta Photonica Sinica

基　　金：西北工业大学博士论文创新基金(CX200611)资助

摘　　要：介绍了一种周期连续可调的微型可编程光栅.光栅采用静电梳齿驱动,不同驱动电压对应不同周期变化,从而引起特定级次衍射角发生变化.为了测得不同驱动电压下的衍射角变化,搭建了实验测量光学系统,利用激光三角法测量原理及图像处理的方法得出实验结果.测量结果与光栅测量参量计算角度变化基本一致,不同电压下的衍射角变化与不同的周期变化对应良好.A MEMS-based pitch-tunable grating with continuously variable pitch is proposed. The grating is electrostatic comb actuated. With the change of the voltage, the pitch and the diffraction angle of specific order are also changed simultaneously. In order to supervise the change of diffraction angle,an experimental measurement system is designed and established, the diffraction angle＇s variability is obtained by image processing. The measured results agree with the theoretical calculation very well. The error has resulted from image processing and structure machining technics error. The experimental results testify about the tuning range of pitch（5%） adequately. This work lays a good foundation for our future research in micro spectrometer and optical communication,and provides valuable technical references.

关 键 词：微机电系统 周期可调光栅 激光三角法 图像处理 

分 类 号：TP211.6[自动化与计算机技术—检测技术与自动化装置]