柔顺双稳态机构的研究现状与进展  

Research and progress on compliant bistable mechanism

作　　者：王娟[1] 吴义伯[1] 张丛春[1] 丁桂甫[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海200240

出　　处：《传感器与微系统》2010年第7期1-3,7,共4页Transducer and Microsystem Technologies

摘　　要：由于柔顺机构和双稳态机构分别所具有的独特优势,已使柔顺双稳态机构成为目前国内外研究的新热点。综合论述了基于MEMS技术的柔顺双稳态机构的最新研究成果,根据柔顺双稳态机构的驱动机制,系统介绍了机械锁定型、电热锁定型、磁致锁定型、多耦合场锁定型等柔顺双稳态机构,针对其原理、性能及应用等各个方面进行了综合比较。最后展望了柔顺双稳态机构的研究前景和可能遇到的问题与挑战。Because of the unique characteristics of both compliant mechanism and bistable mechanism, the compliant bistable mechanism（CBM） has become one of the hotest fields for researchers all over the world. The latest development on research of MEMS-based compliant bistable mechanism in recent years is reviewed. Various actuation mechanisms have been used in the compliant bistable mechanism, including mechanical latching, magnetic latching, electrothermal latching, multi-field coupled latching compliant bistable mechanism. And the working principle, properties and applications are also compared. Research prospects as well as some problems and challenges, with which maybe confronted in the future, are outlined.

关 键 词：柔顺机构 双稳态 锁定机构 微机电系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]