直接驱动XY平台轮廓误差分析及法向交叉耦合控制  

Contour error analysis and normal cross-coupled control for direct drive XY table

作　　者：王丽梅[1] 武志涛[1] 孙宜标[1] 金抚颖[1] 

机构地区：[1]沈阳工业大学电气工程学院,辽宁沈阳110178

出　　处：《电机与控制学报》2010年第9期63-68,共6页Electric Machines and Control

基　　金：国家自然科学基金资助项目(50805098)

摘　　要：在直线电机直接驱动XY平台中,负载扰动、机械延迟以及两轴驱动系统参数不匹配等因素影响轮廓加工精度。采用H∞速度反馈控制、零相位误差跟踪控制(ZPETC)与法向交叉耦合控制相结合的策略对两轴的运动进行协调控制以提高轮廓加工精度,实现跟踪误差与轮廓误差的同时减小。H∞控制在速度环通过反馈作用消除负载扰动因素的影响,使系统具有较好的鲁棒性。ZPETC基于零、极点对消和相位对消提高系统跟踪精度。法向交叉耦合控制作用于两轴之间,将轮廓误差作为直接被控量进行实时补偿控制,有效地提高了轮廓精度并简化了控制器设计。仿真结果表明,所设计的控制系统具有较好的跟踪性、鲁棒性和轮廓精度。Load disturbance,mechanical time delay and parameter mismatch between two axes will affect the contour accuracy of XY table directly driven by two permanent magnet linear synchronous motors.The contour coordination control strategy with H∞ velocity feedback control,zero phase error tracking control （ZPETC） and normal cross-coupled control is proposed to decrease tracking error and contour error for improving contour accuracy.H∞ velocity feedback control can suppress load disturbance and obtain strong robustness,ZPETC can implement precise tracking based on zero-pole and phase cancellations,and normal cross-coupled control can improve the contour accuracy and simplify the controller design by real-time compensation between two axes with the contour error as the direct controlled variable.Simulation results show that the proposed control system possesses good tracking performance,strong robustness and high contour accuracy.

关 键 词：XY平台 H∞控制 零相位误差跟踪控制 轮廓误差 法向交叉耦合控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]