高精度逐场调焦调平实时动态控制算法研究  

Real time and dynamic control algorithm investigation on field by field focusing and leveling with high accuracy

作　　者：张津[1] 姚汉民[1] 唐小平[1] 胡淞[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209

出　　处：《微细加工技术》1999年第3期35-40,共6页Microfabrication Technology

摘　　要：主要介绍一种高精度逐场调焦调平实时动态控制算法。逐场动态精确求解耦合传递矩阵和解耦矩阵，将每个 Ｃ Ｈ Ｉ Ｐ的坐标位置和尺寸纳入耦合关系，使各控制回路实时独立调节，以满足系统稳定和高精度实时逐场调焦调平。A kind of real time & dynamic control algorithm on field by field. focusing and leveling of high accuracy is presented. Coupling transfer matrix; and uncoupling matrix are derived precisely and dynamically field. by field The coordinate and size of each CHIP are brought into coupling relations,so that each control loop can be adjusted independently in real time to achieve the system stability and high accuracy of field by field focusing and leveling of the system.

关 键 词：逐场调焦调平 耦合传递矩阵 IC 光刻 

分 类 号：TN405.7[电子电信—微电子学与固体电子学]