几种硫鎓盐类光产酸剂的合成与性质  

Preparation and Properties of A Few Kinds of Sulfonium Salt Photoacid Generators

作　　者：刘娟[1] 王争[1] 王力元[1] 

机构地区：[1]北京师范大学化学学院,北京100875

出　　处：《影像技术》2011年第4期13-16,12,共5页Image Technology

基　　金：北京市自然科学基金(批准号:2082014)的支持

摘　　要：硫鎓盐类光产酸剂因其较高的产酸效率和好的热稳定性而广泛应用于化学增幅光致抗蚀剂中。本论文选择不同的酚化合物为原料,使之与二甲基亚砜和氯化氢反应,合成了一系列硫鎓盐化合物,研究了其在有机溶剂中的溶解性、热稳定性、紫外吸收性质及其光解特性。以低压汞灯为曝光光源,测定了该类光产酸剂的光解量子效率在0.2—0.7范围。Sulfonium salt is a widely used type of photoacid generator（PAG） in chemically amplified photoresists because of their high photoacid generating efficiency and thermal stability.In this paper,a series of sulfonium salts were prepared by a convenient method.Several different phenolic compounds were reacted with dimethyl sulfoxide in the presence of hydrogen chloride to give the sulfonium salt products.The properties of the sulfonium salts,including solubility in organic solvents,thermal decomposition temperatures,UV absorption and photolysis,were investigated.The quantum yields of the PAGs were detected at the range of 0.2-0.7 by using a low pressure Hg lamp as exposure tool.

关 键 词：光产酸剂 光致抗蚀剂 硫鎓盐 光解 量子效率 

分 类 号：TQ577.35[化学工程—精细化工]