新型差动式集成硅微声传感器  

Novel Differential Integrai Micromachine Sound Sensor

作　　者：徐涛[1] 钟先信[1] 温志渝[1] 费龙[1] 

机构地区：[1]重庆大学

出　　处：《仪器仪表学报》1996年第S1期295-298,共4页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金

摘　　要：本文提出了一种新颖的可获取差动检测信号的集成化硅微光纤传感器结构。该结构使困难的硅微光纤传感器的装调及封装过程大为简化，能有效的抑制检测过程中的多种干扰。本文详述了该传感器制造过程，并进行了传感器的特性实验。实验表明，采用该集成化结构设计的硅微声传感器，具有高的Ｑ值、高的信噪比及很强的抗干扰能力。A novel optical fibre/micromachine integral sound .sensor structure is described, which can gain differential signal. The integral structure simplifies the alignment,fixing and seal of optical fibre/microtnachine sensor. It can effectively restrain the disturbation produced in detect process with differential signal. The detail of the production is described. The experiment results show that the micromachine sound sensor with the integral structure is one with high Q-factor, high S/N ratio and ability restraining disturb. Thesensor can obtain the frequency spectrum analyse of sound signal at the same time of the signal transfering, thus it is a intellectual sensor with signal transfering and analysing.

关 键 词：悬臂梁 声传感 光纤传感器 光纤端面 差动式 掩膜版 硅微结构 频谱分析 位置关系 硅微传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]