集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作  

Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

作　　者：褚金奎[1] 陈兆鹏[1] 张然[1] 

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024

出　　处：《光学精密工程》2011年第12期2935-2940,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51175056);国家973重点基础研究发展计划资助项目(No.2011CB302101)

摘　　要：由于SU-8胶的弹性模量比硅的低,在SU-8胶悬臂梁上集成金属压阻可获得很高的力灵敏度系数,因此本文基于SU-8胶设计并制作了一种集成蛇形结构铜金属压阻层的SU-8胶悬臂梁微力传感器。介绍了制作微力传感器的新型工艺,并进行了传感器性能测试。实验结果表明:设计的SU-8胶微力传感器在0～350μN具有较好的线性度,力灵敏度为0.24mV/μN,测量误差为4.06%。该微力传感器可以满足对微小力的测量,相对于硅材料的微力传感器,其制作工艺更加简单,周期更短。由于SU-8胶的生物兼容性好,该传感器在生物医学研究领域有着很好的应用前景。As the SU-8 cantilever integrated by a metal piezoresistance can achieve a very high force sensitive coefficient due to its low elastic modulus,this paper designs a new type of SU-8 cantilever micro-force sensor integrated by a serpent-shaped copper piezoresistive structure and fabricates a prototype with a double-layer cantilever by a novel processing method.It introduces the design principles and fabrication method for the micro-force sensors and measures its technological parameters. Experimental results show that the SU-8 micro-force sensor has good linearity range in 0-350 μN and its force sensitivity is 0.24 mV/μN and measuring error is 4.06%.It can implement the micro-force detection and has advantages of simpler production process and shorter cycle as compared with a silicon micro-force sensor. Moreover,the force sensor has potential application in biomedical research for the SU-8 with prominent biological compatibility.

关 键 词：SU-8胶 金属压阻 微力传感器 悬臂梁 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]