基于体硅工艺的GLV光学调制器的研制  

Development of bulk silicon process GLV optical modulator

作　　者：刘英明[1,2] 徐静[1] 李四华[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050 [2]中国科学院研究生院,北京100039

出　　处：《光通信技术》2012年第4期22-24,共3页Optical Communication Technology

摘　　要：采用体硅微加工工艺制作了一种基于光栅光阀(GLV)的光学调制器,使用仿真软件对器件参数进行了优化设计。对加工出来的器件进行了测试,并对测试结果进行了分析。器件成功的实现了光学调制的功能,采用10kHz的方波信号进行调制时,得到了峰峰值为50mv,响应时间为10μs的调制后波形。Using bulk silicon micro-machining process fabricated an optical modulator based on grating light valve（GLV）.The parameters of GLV were optimized by using simulation software.The fabricated device was tested and the testing results were analyzed.The device successfully realized the function of optical modulation,when a 10kHz square wave signal was given,a 50mv peak to peak value and 10μm response time was gotten.

关 键 词：体硅工艺 光栅光阀 光学调制器 绝缘体上硅 消光比 

分 类 号：TN256[电子电信—物理电子学]