3140型压阻式微硅加速度计测试与分析  

The Test and Analysis of Model 3140 Piezoresistive MSA

作　　者：毛刚[1] 顾启泰[1] 刘学斌[1] 

机构地区：[1]清华大学精密仪器系,北京市100084

出　　处：《仪表技术与传感器》2000年第5期3-5,12,共4页Instrument Technique and Sensor

摘　　要：微型加速度计作为一种新型惯性传感器 ,它在体积、重量、成本、功耗、可靠性和寿命方面都具有传统加速度计无可比拟的优势。 314 0型压阻式微硅加速度计是美国ICSensors公司的产品。文中介绍了它的结构设计和工作原理 ,并对其重要性能参数进行了测试和分析。As a new style of the inertial sensor, the micro accelerometer has many advantages over the traditional accelerometer in its bulk, weight, cost, power consumption, reliability and length of life. The model 3140 microSi accelerometer(MSA) is a product of IC Sensors Corporation of USA. This paper introduced its structure design and operating theory, measured its important performance data, and presented the measured results and necessary mathematical analysis.

关 键 词：微硅加速度计 测试 分析 惯性传感器 

分 类 号：TH824.403[机械工程—仪器科学与技术] TP212.02[机械工程—精密仪器及机械]