垂直梳齿驱动的大尺寸MOEMS扫描镜  

Large-scale MOEMS scanning mirror actuated by vertical comb

作　　者：刘英明[1,2] 徐静[1] 钟少龙[1] 翟雷应[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室,上海200050 [2]中国科学院大学,北京100039

出　　处：《光学精密工程》2013年第2期400-407,共8页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(2008AA03Z406;2009AA03Z443);国家自然科学基金资助项目(60877066)

摘　　要：提出了一种采用垂直梳齿驱动器驱动的大尺寸、大扭转角度、低驱动电压微光机电系统(MOEMS)扫描镜。理论分析了垂直梳齿驱动器的工作原理,研究了垂直梳齿的制作工艺,采用体硅加工工艺结合硅-硅键合工艺制作了垂直梳齿驱动的MOEMS扫描镜。制作的扫描镜镜面尺寸为3mm×2mm,谐振频率为1.32kHz。测试表明,该扫描镜镜面具有很好的光学表面,其表面粗糙度的均方根只有8.64nm;扫描镜在驱动电压为95V时可以实现最大2.4°的扭转角度;测得其开启时的响应时间为1.887ms,关断时的响应时间为4.418ms。A Micro-opto Electro-mechanical System（MOEMS） scanning mirror with a large size,large torsional angles and a low driving voltage actuated by a vertical comb driver was proposed.The working principle of the vertical comb driver was analyzed and its fabrication process was discussed.By using a bulk micromaching process technology combined with a silicon-silicon bonding process,a vertical comb driver actuated MOEMS scanning mirror was fabricated.The fabricated scanning mirror has a size of 3 mm×2 mm,and a resonant frequency of 1.32 kHz.The test results show that the mirror has a high quality optical surface and the RMS of surface roughness is only 8.64 nm.When the driving voltage is set to be 95 V,the maximum rotation angle of the mirror is 2.4°.Furthermore,the tested turn-on responding time and turn-off responding time for the mirror are 1.887 ms and 4.418 ms,respectively.

关 键 词：微光机电系统(MOEMS) 扫描微镜 垂直梳齿驱动器 体硅工艺 

分 类 号：TH703[机械工程—仪器科学与技术]