一种新型的电离式MEMS气体传感器  

A Novel Ionization MEMS Gas Sensor

作　　者：詹昌华[1] 潘元志[2] 赵小林[1] 侯中宇[2] 

机构地区：[1]上海交通大学微纳科学技术研究院,微/纳加工技术国家级重点实验室,上海200240 [2]上海电气集团股份有限公司中央研究院,上海200070

出　　处：《传感技术学报》2013年第4期467-470,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61274118/F040703,60906053/F040703)

摘　　要：实现了一种新型的电离式MEMS气体传感器,即线性阻抗电离式MEMS气体传感器。该传感器创新地采用了电导率而不是常用的击穿电压来检测不同的气体成分,这样可以避免高电压对器件的影响,提高器件工作状态的可重复性和稳定性。该器件在低压条件下不同气体组分中进行气体放电实验,测出了不同的伏安特性曲线和电导率值,从而证实了该器件的气体传感特性。A novel ionization gas sensor,linear resistivity ionization MEMS gas senor,is presented.This MEMS gas sensor differs from the traditional ionization gas sensor,and does not use the breakdown current to fingerprint gas components,but the conductivity of different gases.This can effectively avoid to damage the electrode structures due to the high applied voltage.This gas sensor has good repeatability and stability.In the low-voltage condition,this gas sensor presented different volt-ampere characteristic curves and conductivities of different gas components,so the gas sensing characteristic of this device was proved.The linear characteristic of this gas sensor is also presented.

关 键 词：微机电系统 一维纳电极阵 电离式气体传感器 气体电导率 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]