MEMS微机械陀螺温度特性分析与建模  

Analyzing and Modeling of the Thermal Characteristics about MEMS Gyroscope

作　　者：陈湾湾[1,2] 陈智刚[1] 马林[2] 付建平[1] 

机构地区：[1]中北大学地下目标毁伤技术国防重点学科实验室,太原030051 [2]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《传感技术学报》2014年第2期194-197,共4页Chinese Journal of Sensors and Actuators

基　　金：总装十二五预研计划项目

摘　　要：针对MEMS微机械陀螺的零偏随温度变化波动较大的特性,通过建立MEMS陀螺零偏随温度变化之间的误差模型,在温度范围为-20℃-60℃温箱试验下,分析MEMS陀螺的零偏输出变化,经去除野值后使用建立的误差模型对零偏进行补偿,结果表明,MEMS陀螺仪因温度引起的零偏从最大约为160°/h,经补偿后降至约为10°/h。该温度误差模型使MEMS陀螺的全温区零偏特性得到了一定程度的提升,为提高之后的导航精度打下基础,具有一定的工程价值。For MEMS gyroscopes,biases characteristics always vary with temperature fluctuations. Through establishing error model between the temperature and the MEMS gyroscope biases,the biases outputs of the MEMS gyroscope are studied within a temperature range of -20 ℃ -60 ℃. Via using the error model after removing outliers,results show that MEMS gyroscope biases caused by temperature have changed from approximately 100 °/h to approximately 10 °/h after compensations. Also biases in the whole temperature range have been improved to some extent,which would lay a foundation for improving the navigation accuracy.

关 键 词：MEMS陀螺 温度特性 零偏 误差补偿 

分 类 号：U666.1[交通运输工程—船舶及航道工程]