一种基于谐振原理的微型压力传感器设计  

Design of Miniaturization Pressure Sensor Based on the Principle of Resonance

作　　者：林丙涛[1] 李海[1] 蒋昭兴[1] 董宏奎[1] 赵建华[1] 张巧云[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2014年第2期159-161,共3页Piezoelectrics & Acoustooptics

摘　　要：设计了一种结构简单的微型石英谐振式压力传感器,该传感器芯片由力学转换元件、谐振敏感元件和支撑元件3部分构成。仿真分析了压力100kPa内传感器输出频率与输入压力的关系,经线性拟合后得出其最大相对非线性误差为0.09%。采用石英深槽湿法腐蚀的方法加工出了芯片3个元件结构,并经镀膜及键合等后工序制作出了传感器芯片,其性能实测值与仿真结果基本吻合,验证了结构及工艺方案的可行性。A new type of microminiature quartz resonant pressure sensor with simple a structure is designed. The sensor is composed of a mechanical conversion component, resonant sensing component and a supporting com- ponent. The relation between the output frequency of sensor and the input pressure at pressure of 100 kPa has been simulated and analyzed, and the simulation result shows that the maximum relative nonlinear error is 0.09% after linear fitting. The three components structures of the sensor chip have been fabricated by the quartz wet etching of Si-trench, and then the pressure sensor chip is manufactured by coating and bonding. The experiment results of the pressure sensor agree well with simulation analysis, which verifies the feasibility of its structure and process.

关 键 词：石英 压力传感器 谐振 线性度 键合 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]