基于永磁薄膜的MEMS磁传感器设计与制作  

Design and fabrication of MEMS magnetic sensor based on permanent magnetic film

作　　者：龙亮[1,2] 钟少龙[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 [2]中国科学院大学微系统与信息技术学院,上海200050

出　　处：《传感器与微系统》2014年第5期59-61,65,共4页Transducer and Microsystem Technologies

基　　金：国家重大科学仪器设备开发专项项目(2012YQ250002)

摘　　要：提出了一种基于永磁薄膜的新型MEMS磁传感器,磁传感器由MEMS扭摆、CoNiMnP永磁薄膜和差分检测电容等部分组成。分析了磁传感器的磁敏感原理和电容检测原理,提出了器件的结构参数并对器件进行了模态仿真。利用MEMS加工技术成功制作了MEMS磁传感器样品,并进行了测试。测试结果表明:得到的MEMS磁传感器的电容灵敏度可达到27.7 fF/mT,且具有良好的线性度。根据现有的微小电容检测技术,传感器的磁场分辨率可达到36 nT。A novel MEMS magnetic sensor based on permanent magnetic film is proposed, including a MEMS torsional pendulum, a CoNiMnP permanent magnetic film and differential detection capacitances. Theories of magnetic sensing and capacitive detection are analyzed and structure parameters are presented and model simulation of the device is carried out. MEMS magnetic sensor sample are fabricated successfully by MEMS process technology and it is tested. The test results show that the MEMS magnetic sensor has good linearity, its capacitance sensitivity is 27.7 fF/mT. Magnetic field resolution of sensor can reach 36nT, according to existing micro capacitance detection technology.

关 键 词：磁传感器 CoNiMnP永磁薄膜 电容检测 微机电系统 

分 类 号：TM936.1[电气工程—电力电子与电力传动]