对蓝宝石衬底上射频溅射的PbTiO_3薄膜的光学特性研究  

Study on the Optical Properties of PbTiO_3 Film Deposited on α-Al_2O_3 with RF-Sputtering System

作　　者：赵强[1] 范正修[1] 冯士猛[1] 汤兆胜[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学学报》2001年第3期309-312,共4页Acta Optica Sinica

摘　　要：使用射频溅射和组合靶在蓝宝石 (α Al2 O3)基底上制备出了结构较好的PbTiO3 薄膜 ,提出了一种利用透射光谱来简单有效地分析弱吸收薄膜的光学特性及与光学相关的其它物理特性的方法。得出了该薄膜在 40 0nm～2 40 0nm区域内的折射率、消光系数等参量与波长的变化关系和与之相符合的柯西 (Cauchy)色散公式 ,并通过外推的方法估算出了薄膜的光学能量带隙为 3.6 5eV。PbTiO3 thin film with perovskite-type microstructure was synthesized directly on the α-Al2O3 substrate using a RF-magnetron sputtering system with a composite target. An effective method was developed to get the optical properties from the transmittance spectrum of the sample, and the dependences of refractive index and extinctive coefficient on wavelength were calculated with this method. The band-gap energy of the film was found to be 3.65 eV from the linear fitting of the absorption coefficient to the Tauc plot of (αhv)2 vs hv.

关 键 词：弱吸收 光学特性 铁电薄膜 射频溅射 蓝宝石衬底 透射光谱 钛酸铅 

分 类 号：O484.41[理学—固体物理] TM223[理学—物理]