高灵敏度QVBA限位结构设计研究  

Design of High Sensitivity QVBA Restrainer

作　　者：林丙涛[1] 周倩[1] 曾小珊[1] 唐光庆[2] 满欣[1] 周本清 李海[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060 [2]中国人民解放军驻重庆气体压缩机厂军事代表室,重庆400050

出　　处：《压电与声光》2014年第4期572-574,579,共4页Piezoelectrics & Acoustooptics

摘　　要：石英振梁加速度计(QVBA)具有检测精度高、准数字输出的特点,灵敏度是影响其性能的一个重要指标参数。针对现有石英振梁加速度计灵敏度低的问题,设计了一种高灵敏度石英振梁加速度计。它采用在石英摆片上下位置施加一对限位片,既可对石英摆片的最大位移量进行限制以提高器件的抗冲击性能,又可增加石英摆片振动过程中的阻尼力以提高器件的抗振动性能,降低了加速度计一阶模态谐振频率的限制条件,有效提高了加速度计的灵敏度。最后依据加速度计的结构特点设计出了相应的工艺制作方案,并加工出了差分结构的加速度计样机,经测试其灵敏度为65.74Hz/g,10min零位稳定性为15.8μg。Quartz vibrating beam accelerometers （QVBA） are particularly attractive for their high precision and frequency output,and the sensitivity is an important factor which influences its performance. A new QVBA structure is performed to improve the sensitivity,in which one pair of restrainers is mounted above and under the quartz reed. The anti-shock performance of QVBA is enhanced for the maximum displacement of quartz reed is restrained by re- strainer and the ability to resist vibration is enhanced too for the improvement of damp applied on the quartz reed,so the sensitivity of QVBA can be improved since the restriction of its first-order modal frequency is decreased. The manufacturing process of the QVBA is designed by which the differential QVBA is manufactured. Under room tem- perature,the sensitivity of the differential QVBA is 65.74 Hz/g and bias stability is 15.8 μg in 10 min.

关 键 词：石英振梁加速度计 限位片 灵敏度 差分 阻尼 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]