基于ZPET-FF和ESO的直线伺服鲁棒跟踪控制  

Linear Servo Robust Tracking Control Based on ZPET-FF and Extended State Observer

作　　者：陈兴林[1] 刘川[1] 周乃新[1] 王斌[1] 

机构地区：[1]哈尔滨工业大学航天学院,哈尔滨150001

出　　处：《上海交通大学学报》2014年第5期679-684,共6页Journal of Shanghai Jiaotong University

基　　金：国家科技重大专项资助项目(2009ZX02207)

摘　　要：提出一种将零相位误差跟踪和前馈(ZPET-FF)与扩张状态观测器(ESO)相结合的重复控制方法,以提高宏动台直线电机伺服系统的跟踪性能.以ZPET-FF作为前馈跟踪控制器,将信号估计器估计的跟踪误差和系统的实时误差作为其输入信号,将控制器对系统的跟踪误差进行实时补偿,以降低参数变化对系统的影响,有效提高系统的带宽和跟踪性能,减小系统的动态跟踪误差;采用ESO补偿系统中的各种扰动抑制噪声,以提高系统的抗干扰能力.实验结果表明,所提出的控制方法不仅提高了系统的动态跟踪性能,而且减小了系统的跟踪误差.An nm-level positioning precision and high-speed were required by using macro movement of long stroke linear motor and high-precision micro movement of planar motor in the wafer stage of lithography. In order to reduce the movement scope and acceleration of planar motor, the tracking precision of linear motor must be improved. Therefore, this paper presented a combined repetitive control strategy based on the combination of zero phase error tracking-feed-forward （ZPET-FF） controller and the disturbance ob- server （ESO）. The ZPET-FF was used as the feed-forward controller, which used the real-time compensa- tion of the controller according to the tracking error of the system, so that the influence of parametric vari- ation of the system and the dynamic tracking error of the system could be reduced, while ESO reduced the influences of the uncertainties, suppressed the system noise and improved the anti-interference ability of the system effectively. The experiment shows that the proposed control method not only improves the dy- namic tracking performance of the system, but also reduces the tracking error of the system.

关 键 词：光刻机 工件台 掩模台 零相位误差跟踪控制器 扩张状态观测器 

分 类 号：TN305.7[电子电信—物理电子学]