剪切干涉仪精密相移系统的研制  

Development of precise phase-shift system in the shear interferometer

作　　者：于长淞[1] 代雷[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程研究中心,长春130033

出　　处：《国外电子测量技术》2014年第12期57-60,共4页Foreign Electronic Measurement Technology

摘　　要：设计了一种用于迈克尔逊干涉仪横向剪切相移测量的精密相移系统。该系统采用压电陶瓷驱动器作为驱动元件,通过柔性铰链平移机构推动反射镜实现无摩擦、无间隙微位移。采用电容传感器进行位移反馈测量,利用单片机系统作为中央处理器进行PID闭环控制以实现高精度相移。对相移系统的行程及定位精度进行了测试,当输入阶跃位移信号为80nm时,相移系统输出位移精度小于3nm。当相移系统连续位移2μm,每步位移为80nm时,其输出位移的定位精度小于5nm。实验结果表明,相移系统的行程与定位精度满足剪切干涉仪设计要求。A precise phase-shift system is designed to realize the lateral shear phase-shift interferometry measurement based on Miehelson interferometer. The system is realized the micro-displacement with non-friction and non-clearance by the translation mechanism of flexure hinge to push reflection mirror which is derived by Piezoelectric Transducer. Capacitive sensor is used to measure the displacement feedback. A relevant closed-loop PID control is designed with MCU system as a central processor, in order to realize precision phase-shifting. The travel and positioning accuracy of the phase shift system was tested. When the input step displacement signal is 80 nm, phase shift system output displacement accu- racy is less than 3 nm. When the phase shift system continuously displacement 2 μm, every step displacement of 80 nm, the positioning accuracy of the system output displacement is less than 5 nm. The experimental results show that, the travel and positioning accuracy of phase shift system can meet the shearing interferometer design requirements.

关 键 词：相移干涉 精密相移系统 压电陶瓷驱动器 柔性铰链 闭环控制 

分 类 号：TP96[自动化与计算机技术] TN29[电子电信—物理电子学]