高压LED阵列电学特性的优化方法的研究  

Optimization Methods' Study of High-Voltage LED's Electrical Properties

作　　者：王红航[1] 杜志娟[2] 刘飞飞[2] 于宁[2] 朱彦旭[2] 王岳华[2] 宋会会[2] 曹伟伟[2] 

机构地区：[1]电子科技大学中山学院电子薄膜与集成器件国家重点实验室中山分实验室,广东中山528400 [2]北京工业大学北京光电子技术实验室,北京100124

出　　处：《仪表技术与传感器》2016年第8期81-83,91,共4页Instrument Technique and Sensor

基　　金：国家支撑计划项目(2011BAE01B14);北京市教委基金项目(KM201210005004);北京市15青年拔尖项目(311000543115501);中山市科技计划项目(2014A2FC305);北京市教委项目(PXM2014_014204_500008);电子薄膜与集成器件国家重点实验室中山分室开放基金(412S0601)

摘　　要：高压LED制备工艺中,优化电极参数是获得均匀分布电流,改善电流输运特性,提高器件出光效率的主要方法之一。改进不同隔离层制备工艺参数与电极参数,抽样检测样品,对结果分析发现,Cr/Au电极厚度分别达到500 nm/300 nm后,总体提高了高压LED的电流输运特性,减少了高压LED漏电现象,增强了高压LED的电学稳定性,改善了金属电极厚度对高压LED的影响。通过二步法制备隔离层,改变LED工艺参数及隔离层倾角,制备出正向电压约12 V的串联高压LED。In the manufacturing process of high-voltage LED,optimizing electrode parameters is one way to get uniform distribution current,improve current transport properties and improve the device luminous efficiency.Improving the isolation layer preparation process parameters and electrode parameters and sampling the testing samples with the thickness of Cr/Au up to 300 nm/500 nm to improve the high-voltage LED leakage current transport property,and reduce high voltage LED leakage phenomenon,improve the electrode voltage LED reliability,resulting in improving the metal electrode thickness effect on high voltage LED.By two-step preparation of isolation layer and change LED process parameters and isolation layer dip angle,series high voltage LED whose forward voltage is about 12 V was successful prepared.

关 键 词：氮化镓 电极参数 高压LED 电流输运特性 光输出功率 电学特性 

分 类 号：O472[理学—半导体物理]