Z切石英在氟化氢铵溶液中的腐蚀特性  

Z-cut quartz etching properties of ammonium bifluoride solution

作　　者：张照云[1] 苏伟[1] 唐彬[1] 高杨[1] 熊壮[1] 陈颖慧[1] 彭勃[1] ZHANG Zhao-yun SU Wei TANG Bin GAO Yang XIONG Zhuang CHEN Ying-hui PENG Bo(Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China)

机构地区：[1]中国工程物理研究院电子工程研究所,绵阳621999

出　　处：《中国惯性技术学报》2017年第2期256-259,264,共5页Journal of Chinese Inertial Technology

基　　金：中国工程物理研究院超精密实验室自主面上基金(ZZ16003)

摘　　要：对Z切石英在氟化氢铵溶液中的腐蚀特性进行了研究。首先研究了Z向腐蚀速率随腐蚀温度和腐蚀液浓度的变化关系,然后研究了Z向表面腐蚀粗糙度随腐蚀深度、腐蚀液体浓度、腐蚀温度的变化规律,最后将石英在氟化氢铵溶液中的腐蚀特性跟在BHF溶液中的腐蚀特性进行了简单对比。试验结果表明:腐蚀速率随腐蚀温度和腐蚀液浓度增加而增加;Z向腐蚀表面粗糙度随腐蚀时间的增加而增加;提高腐蚀液体浓度有利于减小腐蚀表面粗糙度;提高腐蚀液体温度有利于减小表面粗糙度;石英在氟化氢铵溶液腐蚀具有更高的腐蚀效率和更小的腐蚀表面粗糙度。本研究结果能够为石英MEMS器件的设计和工艺提供有益帮助。The etching properties of Z-cut quartz etched in the ammonium bifluoride solution are investigated. At first, the etching rate＇s relations with the etching temperature and the solution concentration are studied. Then, the roughening characteristics of Z-direction surface corrosion roughness with morphology, etching time, solution concentration, and etching temperature are investigated. At last, the comparative experiments on the etching characteristics in ammonium bifluoride solution and in BHF solution are made. The experimental study results indicate that： 1） the etching rate is increased with the etching temperature and the solution concentration; 2） the Z-direction surface corrosion roughness is increased with the etching time; 3） increasing the concentration and temperature of the solution can both reduce the etching roughness; and 4） compared with BHF, the quartz etched in the ammonium bifluoride solution has higher corrosion efficiency and better corrosion surface roughness. The systematic study on the evolution law of the quartz＇s etching rate and surface roughness in ammonium bifluoride solution can provide useful help for the design and the process of the quartz MEMS devices.

关 键 词：微电子机械系统 湿法腐蚀 Z切石英 表面粗糙度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]