AZO薄膜理想表面形貌的制备与加工工艺优化  

Preparation and optimize of sputtered AZO film surface morphology

作　　者：李晓东[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2017年第3期90-94,共5页Optical Instruments

摘　　要：非晶硅薄膜太阳能电池主要采用掺氟氧化锡(FTO)导电玻璃作为基板,但FTO薄膜雾度较低、表面形貌无法优化,导致无法得到较优的陷光结构,从而限制了太阳能电池的转换效率。为了进一步提升太阳能电池的转换效率,探讨了替代型的掺铝氧化锌(AZO)薄膜,通过优化前段磁控溅射镀膜工艺和后段湿化学蚀刻工艺,用以平衡AZO薄膜的光电性能和雾度,从而获得具有理想表面形貌的AZO导电玻璃,使其成为理想的非晶硅薄膜太阳能电池的基板材料。实验表明,经工艺优化后制作的AZO导电玻璃可提升光电转换效率。Amorphous silicon thin film solar cells mainly use fluorine doped tin oxide（FTO）conductive glass as substrate.The haze is low and the FTO film surface morphology can＇t be optimized.It is unable to get a better trap light structure,so it is unable for FTO glass to further enhance the conversion efficiency of the battery.This paper mainly discusses the alternative material of conductive glass-aluminum doped zinc oxide（AZO）thin films.The paper focuses on how to optimize the sputtering coating process and the wet-etching process,in order to balance the photoelectric performance of AZO thin films and haze,which has the ideal surface morphology of AZO glass.The AZO thin film is an ideal amorphous silicon thin film solar cell substrate material,and it can continuously improve the photoelectric conversion efficiency.

关 键 词：AZO薄膜 磁控溅射 湿法刻蚀 表面形貌 非晶硅薄膜太阳能电池 

分 类 号：TU73[建筑科学—建筑技术科学]