MEMS陀螺仪闭环检测控制系统设计  

Design of Closed - loop Detection Control System for MEMS Gyroscope

作　　者：刘嘉[1] 庄永河[1] 

机构地区：[1]中国电子科技集团公司第43研究所,合肥230088

出　　处：《混合微电子技术》2017年第1期8-11,15,共5页Hybrid Microelectronics Technology

摘　　要：MEMS陀螺仪的开环检测系统在抗干扰性、带宽方面有明显不足，无法满足较高精度使用场合的要求，本文在介绍硅微机械振动式陀螺仪工作原理和分析其动力学特性的基础上，设计了基于力反馈平衡的硅微陀螺仪敏感模态闭环控制方案。敏感信号经放大、滤波、积分后，由驱动信号调制为反馈信号，形成反馈力平衡哥氏力。利用Simulink对闭环系统进行了仿真，结果表明，交流反馈力有效抵消了哥氏力，拓展了带宽，实现了有效信号提取和力反馈控制。The open - loop detection system of MEMS gyroscope has obvious disadvantages in anti - interference and band- width, which cannot meet the requirement of high accuracy. A sensitive mode＇s closed -loop control system based on the force feedback balance of silicon micro gyroscope is designed on the basis of the presentation of the silicon micro - mechanical vibrating gyroscopeg working principle and the analysis of its dynamic characteristics in this paper. Sensitive signal is modulated by the driving signal as the feedback signal to balance the Coriolis force after amplification, filtering and integration. Simulink is used to simulate the closed -loop system. The results show that the AC feedback force effectively compensates the Coriolis force and ex- tends the bandwidth to realize effective signal extraction and force feedback control.

关 键 词：MEMS 陀螺仪 闭环控制 力反馈 

分 类 号：TH-39[机械工程]