脉冲准分子激光淀积薄膜的实验研究  

Study on pulsed excimer laser deposited films

作　　者：刘晶儒[1] 白婷[1] 姚东升[1] 李铁军[1] 王丽戈[1] 袁孝[1] 王晟[1] 叶锡生[1] 

机构地区：[1]西北核技术研究所,陕西西安710024

出　　处：《强激光与粒子束》2002年第5期646-650,共5页High Power Laser and Particle Beams

基　　金：国家 8 63 80 4主题资助项目

摘　　要：利用两种脉宽 (30ns,5 0 0fs)的KrF准分子激光展开了淀积类金刚石薄膜的实验研究 ,并且成功地制备了大面积不含氢成分的HF DLC薄膜 ,运用时空分辨的等离子体发射光谱诊断系统和离子探针系统研究了等离子体特性对薄膜性能的影响。尝试了利用准分子激光制备非晶硅薄膜 ,研究了实验参数对非晶硅薄膜制备的影响 。Pulsed lasers of two different durations (30 ns, 500 fs) are used to deposit Hydrogen-free Diamond Like Carbon (DLC) films over large areas. Analysis of DLC films shows remarkable mechanical, optical, electrical, and chemical properties that are close to those of diamond. By optical emission spectroscopy and ion probe, the effects of plasma characteristic on DLC film are on experimentally studied. Amorphous silicon films deposited by PLD are also experimentally studied.

关 键 词：准分子激光 实验研究 脉冲激光淀积 类金刚石薄膜 非晶硅薄膜 

分 类 号：O484.1[理学—固体物理] TN248.22[理学—物理]