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作 者:吕栋腾[1] 韩克华[2] Lü Dong-teng;HAN Ke-hua(Shaanxi Institute of Technology,Xi’an,710300;Shaanxi Applied Physics and Chemistry Research Institute,Xi’an,710061)
机构地区:[1]陕西国防工业职业技术学院,陕西西安710300 [2]陕西应用物理化学研究所,陕西西安710061
出 处:《火工品》2019年第3期5-9,I0001,共6页Initiators & Pyrotechnics
摘 要:采用非平衡磁控溅射法制备得到不同厚度的铜膜和铝膜,采用扫描电镜(SEM)、台阶仪以及阻抗分析仪进行表征,并对其电爆性能进行测试。实验结果表明,金属薄膜在溅射过程中,溅射功率决定金属薄膜的质量,既溅射功率越大,金属薄膜的致密性越好,晶粒颗粒越小,晶粒分布也越均匀;桥箔厚度对爆发时间和爆发电流均有显著影响,较薄的桥箔电爆性能优于较厚的桥箔;比较相同桥区尺寸、相同厚度的铜箔和铝箔,铝箔电爆性能更好。The Cu foil and the Al foil were prepared by magnetron sputtering method,the structure and morphology of Cu foil and Al foil samples were characterized by transmission electron microscopy (SEM),the resistance and the inductance were tested by impedance analyzer,and the performance of electrical exploding were tested in this study.The results showed that during the sputtering process,the sputtering power influences the quality of metal film,the more sputtering power,the better consistency of metal film,the less metal crystal,and the better distributing uniformity of metal crystal.Experiments were performed to investigate the relationship between the thickness and the electrical exploding performance of bridge foil,which showed burst current and burst time of the thin bridge foil was better than that of the thick bridge foil,and as far as the same size of bridge foil be concerned,that burst current and burst time ofAl foil was better than that of Cu foil.
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