铁芯和空芯螺线管型微电感器的性能比较  

Performance Comparison of Permalloy Core and Coreless Solenoidal Microinductors

作　　者：吴茂松[1] 杨春生[1] 茅昕辉[1] 赵小林[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院信息存储研究中心,上海200030

出　　处：《微细加工技术》2003年第1期61-64,共4页Microfabrication Technology

摘　　要：为了满足RF电路、电源电路、微执行器和微传感器等领域对高性能和工艺简单的电感器的广泛需求,用正、负胶结合的微加工工艺,在硅基片上制作了有坡莫合金铁芯的和在玻璃基片上没有铁芯的、其它结构和参数均相同的两种螺线管型微电感器,测试了它们在1～40MHz频率范围的电感、电阻和Q因子,并进行了比较和讨论。其结果与现有理论知识相一致。实验证明了具有坡莫合金铁芯的螺线管型微电感器在低于30MHz的频率下使用更有意义。而无铁芯螺线管型微电感器还可以用于更高频率的场合。To meet the extensive requirements for MEMS solenoidal inductors with high performance and simple process in the areas of RF circuits,power circuits, microactuators and microsensors,solenoidal microinductors with permalloy core on silicon and coreless solenoidal microinductors on glass substrate, whose other structure parameters are the same, are microfabricated by means of the process using both positive and negative photoresists. Their inductance,resistance and quality factors in frequency range 1～40 MHz are measured,compared and discussed. The results are accordant with the existing theory and knowledge. Experiment proves that it is insignificant to use the inductor of permalloy core at frequency above 30 MHz while the inductor without permalloy core can be used at much higher frequency.

关 键 词：微机电系统 电感器 SU-8 微加工 螺线管 

分 类 号：TM55[电气工程—电器]