低电压缴反射镜型微机械光开关的设计与制作  

Design and Fabrication of Reflective Micromirror Micromechanical Optical Switches Based on the Low Applied Voltage

作　　者：董玮[1] 阮圣平[1] 张歆东[1] 刘彩霞[1] 贾翠萍[1] 潘建旋[1] 张龙[1] 孙东明[1] 纪平[1] 陈维友[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,长春130023

出　　处：《高技术通讯》2003年第7期46-49,共4页Chinese High Technology Letters

基　　金：863计划 ( 2 0 0 2AA3 12 0 2 3 );国家自然科学基金 ( 6993 70 10 );吉林省科学计划发展 ( 2 0 0 10 3 19)资助项目

摘　　要：利用 (1 0 0 )硅片和偏 2 5°的 (1 1 1 )硅片制作了静电驱动扭臂结构微反射镜型 2× 2光开关。微反射镜、自对准V型槽和扭臂结构是在 (1 0 0 )硅片上制作的 ,反射镜与光纤槽之间靠晶向自对准 ,反射镜与光轴垂直度较好。在偏 2 5°的 (1 1 1 )硅片上制作倾斜下电极结构 ,实验测得的 pull in电压为 1 3 2V ,几乎比平面下电极的 pull in电压降低一半。采用准直光纤耦合 ,开关的插入损耗小于 1 4dB ,串话小于 - 5 0dB。A micromechanical torsion beam reflective micromirror optical switch driven by electrostatic was fabricated with (100) silicon and tilted 2 5° (111) silicon. The reflective micromirror, self aligned V grooves and torsion beam were fabricated on (100) silicon. The reflective micromirror and V grooves are self aligned, and the perpendicularity between micromirror and optical axis is well. The slanted under electrode was fabricated on tilting 2 5° (111) silicon. The pull in voltage obtained in the experiment is 13 2V, it is almost half of that based on the flat under electrode. The insertion loss is less than 1 4dB, the crosstalk is less than -50 dB.

关 键 词：微机械 光开关 微反射镜 硅 静电驱动 扭臂结构 倾斜下电极 自对准V型糟 制作方法 全光网络 

分 类 号：TH703[机械工程—仪器科学与技术]