基于MEMS技术的微电容式加速度传感器的设计  

Design of a micro capacitive acceleration sensor based on MEMS

作　　者：程未[1] 曾晓鹭[1] 卞剑涛[1] 冯勇建[1] 

机构地区：[1]厦门大学萨本栋微机电研究中心,福建厦门361005

出　　处：《传感器技术》2003年第8期75-77,共3页Journal of Transducer Technology

摘　　要：给出了一种基于MEMS技术制作的微电容式加速度传感器的结构及工艺。为了准确地把握这种微电容式加速度传感器的力学和电学特性,仔细地建立了它的力学模型。在此基础上,详细分析了它的动态特性———模态。并用有限元的方法分析和计算了微电容式加速度传感器的加速度与电容信号的非线性输入输出关系,并结合实测参数验证了模型的有效性。最后提出了一种详细的有效的基于MEMS技术的微电容式加速度传感器的结构以及加工工艺流程。基于MEMS技术制作的微电容式加速度传感器具有结构简单、工作可靠和工作范围大的特点。根据这套方法,可以比较方便地设计并加工不同测量要求的加速度计。Structure and process of a micro capacitive acceleration sensor based on MEMS technology were given.So did the fabrication process.With the purpose of grasping the sensor's characters of mechanics and electrics,its mechanics model was discussed.On this basis the sensor's modal analysis was made.In order to get the nonlinear relationship between the acceleration and capacitive signal,an effective method based on FEA was proposed.The detail processing steps was designed,which explained the feasibility of the fabrication.The sensor has advantages of simple structure,operation reliability and the wide work range.Using this set of method,sensors with different test ranges can be designed and fabricated.

关 键 词：微机电系统 有限元分析 加工工艺 MEMS技术 微电容式加速度传感器 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]