一种基于MEMS技术的微变电容  

A Micro-Variable Capacitor Based on MEMS Technology

作　　者：卞剑涛[1] 程未[1] 冯勇建[1] 颜黄苹[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《微电子学》2003年第5期453-455,共3页Microelectronics

摘　　要：　通过对接触式电容压力传感器的改进,提出了一种基于MEMS技术的微变电容模型。为确定外加驱动电压与由此所引起的电容变化之间的非线性关系,提出了一种有效的基于有限元的方法,并设计了相应的加工工艺流程,说明了其工艺的可实现性。With the improvement of the touchmode capacitive pressuresensor,a microvariable capacitor based on MEMS technology is presented In order to define the nonlinear relationship between the applied driving voltage and the capacitance variation, an effective method based on finite element analysis (FEA)is proposed Processing steps are designed, and the feasibility of the process is elaborated

关 键 词：MEMS 微变电容 电容压力传感器 有限元分析 工艺流程 工作原理 

分 类 号：TM53[电气工程—电器]