硅尖的制备及应用  

Fabrication of Silicon Tip and its Application

作　　者：王艳华[1] 马海阳[1] 孙道恒[1] 

机构地区：[1]厦门大学机电系,2000研厦门361005

出　　处：《微电子技术》2003年第5期60-64,共5页Microelectronic Technology

摘　　要：本文介绍了硅尖的制备及其在不同领域的应用。硅尖的制备方法可与现代IC工艺兼容且易削尖 ,故比其它材料微尖更实用。The fabrication of silicon tip and its application in different fields are introduced in the article. The method to fabricate silicon tip is compatible with modern IC technology; in addition, the silicon tip may be easy to sharp, so that it is more practical than other materials. It is believed that the application of silicon tip will be newly developed with the improvement of fabrication technology and other correlative technologies.

关 键 词：硅尖 刻蚀 微加工技术 

分 类 号：TN304.12[电子电信—物理电子学]