基于玻璃湿法刻蚀的微流控器件加工工艺研究  

RESEARCH ON GLASS WET ETCHING FOR MICRO FLUIDIC DEVICES

作　　者：谢海波[1] 傅新[1] 刘玲[1] 杨华勇[1] 徐东[2] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,杭州310027 [2]上海交通大学

出　　处：《机械工程学报》2003年第11期123-129,共7页Journal of Mechanical Engineering

基　　金：国家'863'高技术发展计划(2002AA404220);国家自然科学基金(50175098);教育部科学技术研究重点基金(109102-A20202)

摘　　要：介绍了以玻璃为基体材料的微加工工艺流程,重点研究了玻璃湿法刻蚀工艺,选择多种不同成分的刻蚀剂进行了对比性刻蚀试验,同时研究了刻蚀温度、搅拌方式和清洗间隔时间等多种刻蚀条件对刻蚀效果的影响,研究主要以高刻蚀速率的深度刻蚀以及高表面质量的毛细管道刻蚀两种典型应用为目标。对比与分析了多种试验结果并对其适用范围进行了适当的评价,为基于玻璃材质的微流控器件加工工艺提供了基本选择方案及实际经验曲线。The microfabrication process flow of glass is proposed, the glass wet etching as the priority research area is discussed and demonstrated. A series of comparable experiments are done to observe the etching effects with different etching solutions, at the same time the effects of different etching conditions, such as etching temperature, rabbling mechanism, cleaning interval on the etching results are investigated and studied experimentally. The research targets are mainly for two typical applications, high etching rate for deep etching such for micro pumps and high surface quality etching for capillary channels. The results are also compared and analyzed to determine the scope of applications of different etching solutions and conditions, which provides basic scheme and experience curves for fabrication of microfluidic devices with glass.

关 键 词：微流控器件 加工工艺 玻璃 湿法刻蚀 MEMS 微机电系统 

分 类 号：TH16[机械工程—机械制造及自动化] TH-39