基于压电陶瓷驱动的微操作手研究现状  

Current situation in the development of micromanipulator driven by piezoelectric actuator

作　　者：荣伟彬[1] 曲东升[1] 孙立宁[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150001

出　　处：《微纳电子技术》2003年第7期590-594,共5页Micronanoelectronic Technology

基　　金：国家 8 63计划资助项目 (2 0 0 1AA42 2 12 0 ) ;国防基础科研项目

摘　　要：微操作手是微操作机器人的重要组成部分 ,首先介绍了国内外研制的几种典型微操作手。在此基础上 ,对于微操作手的关键技术 ,从机构、驱动、传感、检测几个方面进行了论述 ,在机构上 ,介绍了微位移定位机构的特点 ;在驱动方式上 ,论述了压电陶瓷的驱动方法 ;在微位移检测上 ,介绍了几种纳米微位移检测手段。最后 ,阐述了微操作手的发展趋势 :微型化、集成化、智能化 。Micromanipulator is the key component of micromanipulating system.Several typical micromanipulators developed abroad and domestically are introduced. Based on that, some key technologies of micromanipulator are discussed, including mechanism, actuator, sensors and controller. Accordingly, the characteristics of microdisplacement mechanism are described. The driving method of piezoelectric actuator is introduced. Several nano measuring sensors are compared. At last, the tendency of micromation, integration and intelligence in the development of micromanipulator is proposed. Nanometer scale or more positioning accuracy will be reached.

关 键 词：压电陶瓷 微操作手 微操作机器人 纳米定位 微机电系统 

分 类 号：TP241[自动化与计算机技术—检测技术与自动化装置]